The Kozen research group at UVM is housed in Discovery W121, a 641 square foot facility on the first floor of Discovery hall.
Veeco Savannah S-200 Atomic Layer Deposition System: This thermal ALD system with operation up to 350C contains 6 ALD precursor delivery lines, two low-vapor pressure delivery systems, ozone generator, and integration into an Ar-filled glovebox. The Savannah can accommodate 8 circular substrates up to 5 mm high and can produce ALD films up to 100 nm thick with < 2% non uniformity.
BioLogic VSP-300 Potentiostat (glovebox-integrated): this instrument provides two-channel high-impedance referencing for solid-state electrochemical measurements up to 7 MHz with 10 pA sensitivity. It is connected to a 3″ wafer probe station inside an Ar-filled glovebox, but can be relocated for in-situ electrochemical measurements if necessary.
Ultra-High Vacuum Surface Science Chamber: this vacuum chamber system will provide UHV sample cleaning, modification, and surface analysis using Ar+ sputtering, thermal annealing, and Auger spectroscopy.
The Kozen Group also has shared equipment available in the Physics teaching & instrumentation facility and class 100 cleanroom:
J.A. Woollam M-2000D Spectroscopic Ellipsometer with microspots and automated mapping base for large-area analysis. Dektek profilimeter. Hitachi SEM. Horiba LabRAM HR Raman and AFM system with LinkAM Environmental cell with heating up to 600C in inert ambient and optical access via quartz window.
